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Gas Cabinet and Gas Scrubber for a Silicon Nitride Etch Process

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[Full question here] We are bidding the installation of either a Plasmatherm or Novellus Silicon Nitride tool, and I need to include a price for gas cabinets and a scrubber in the bid. What do I need?  The gases are SiH4, NH3 and N2.

Answer:   The process your customer will most likely run will be a PECVD process that uses these gases. While different process recipes vary and you should find out the flow rates to confirm, a typical Silicon Nitride Etch process will use well under a liter a minute of silane and ammonia. The nitrogen will be used in the purge process. Because of this, you can use our reconditioned Air Products gas cabinets set up as a 2 cylinder Process, Purge. These are fully automated and the silane cabinet conforms to the requirements of CGA Code G-13. For the scrubber, we can offer a Nanopure EGS237, which is a resin bed scrubber that is reconditioned as well and comes with a new canister of abatement media. Regarding pricing, I can’t say without further discussion, but I can tell you the cabinets will be 30% to 40% less than the price of new cabinets, and the scrubber well over 50%.  Both cabinets and scrubbers come with warranties and on-site commissioning.

Also, you can find a pdf that provides additional facilitation information for this process here:  gas systems for silicon nitride etch process

Gas Cabinet and Gas Scrubber for a Silicon Nitride Etch Process was last modified: May 29th, 2014 by admin

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Since 1998, Critical Systems, Inc. (CSI) has been providing Gas Cabinet, Valve Manifold Boxes & Gas Abatement Systems (Gas Cabinets and Gas Scrubbers, etc.), and Orbital Welding Rental, Lease, Repair and Training Services related to process tool facilitation for Semiconductor, Biotech, Pharmaceutical and related industries. Company headquarters are in Boise, ID, with additional locations in Burnsville, MN, and Shrewsbury, PA, Austin, TX and Draper, UT.