IDEA COLLABORATION CENTER

A resource for all things related to supporting the Process Tool

The Idea Collaboration Center was created to share ideas & best practices in order to promote safe and effective ways to run technology based processes in Semiconductor and related fields. We invite you to ask questions, post comments, ideas, and links, or even share a video of your own.

Recommended point of use gas scrubber for solar processes?

By admin |

[Full Question:]   I work for a solar company and am wondering what kind of gas scrubbers are recommended to be used at the tool (not a big facility scrubber).

Answer:   The flows for solar, PV, or LED processes are usually pretty high so the biggest thing is to make sure that the point-of-use scrubber can handle the flow.    Second thing is the type of gas which will usually be either H2 ro NH3.    If it’s H2, then a Guardian scrubber is my recommendation.   For NH3 gas, then people usually go with a Vector point of use scrubber.

Recommended point of use gas scrubber for solar processes? was last modified: June 11th, 2014 by admin

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Since 1998, Critical Systems, Inc. (CSI) has been providing Gas Cabinet, Valve Manifold Boxes & Gas Abatement Systems (Gas Cabinets and Gas Scrubbers, etc.), and Orbital Welding Rental, Lease, Repair and Training Services related to process tool facilitation for Semiconductor, Biotech, Pharmaceutical and related industries. Company headquarters are in Boise, ID, with additional locations in Burnsville, MN, and Shrewsbury, PA, Austin, TX and Draper, UT.