Delatech Gas Scrubbers and Parts

Reconditioned, Warrantied Delatech Gas Scrubbers and Parts at a Significant Savings vs. New

Buy Delatech Gas Scrubber Parts Here.

The Delatech CDO 858/859 Exhaust Gas Scrubber has long been considered the standard for Advanced Chemical Vapor Deposition (CVD) Process gas abatement, and has been effectively used with all PECVD, LPCVD & MOCVD process gases.   Delatech scrubbers are also widely used in Thin Film processes.

This versatile gas scrubber utilizes a combination Thermal Oxidation Chamber and a Primary/Secondary Cooling Wet Scrubbing Chamber to effectively abate toxic, flammable and corrosive gases.

CDO 859 Reconditioning Process (high level)

  • Thermal chamber & wet scrub assembly is removed, decontaminated and cleaned.
  • Spray nozzles checked for proper flow rate and repositioned for optimum coverage.
  • Scrubber balls, O-rings, and seals are cleaned and/or replaced.
  • Recirculation unit is cleaned — components checked and recalibrated if necessary.
  • CDO is then reassembled, functions are tested, sensor/alarms are checked.
  • Gas Scrubber is tested at full temperature for 24 hours to ensure optimal working order.
  • All systems are backed by CSI’s 6 month warranty

Standard Features

  • 1, 2, or 4 inlet nozzles (allowing up to 4 connections to process chambers, process tools, or vacuum pumps)
  • Thermal Reaction Chamber features a resistive heating element.
  • Primary and Secondary wet cooling/scrubbing sections.
  • Demister Washing System provides automatic cleaning
  • Exhaust Moisture Suppression System.
  • Liquid level detection.
  • Tool interlocks to process tools

Available Options

  • Cooling/Scrubbing Recirculation
  • Sump Pump
  • Cabinet Exhaust Alarm
  • CSI Designed “U” Drain and Cooling Nozzle Assembly (see photos above)

 Delatech CDO Selection Criteria

  • Mixture of Gases
  • Individual & Total Gas Flow Rates
  • Duty Cycle
  • Single Pass or Water Recirculation
  • Number of Ports Desired ( 1 – 4 )
  • Desired Options

CSI has also developed many practical component level modifications for Delatech Scrubbers.  These components are stocked and readily available.

PART NUMBER DESCRIPTION
814-01-013 859 DUAL NOZZLE ASSSY
814-01-014 859 MULTI NOZZLE ASSSY
513-57-001 FLANGE GASKETS
428-57-004 SLIP FIT SPACER
513-57-002 INCONEL FLANGE GASKETS
422-57-022 SLIP FIT SLEEVE
428-57-003 SLIP FIT FLANGE
422-57-002 BODY TUBE
811-02-004 HEATER POWER FEED THROUGHS
162-02-009 CONTROL TERMOCOUPLE Single
162-02-009-D CONTROL TERMOCOUPLE Double
535-02-003 ORIFICE .012 1/8″ NPT FEMALE X MALE
811-57-006 HEATER ELEMENT ASSEMBLY
423-57-003 INCONEL LINER
422-47-010 PRIMARY COOLING INLET SHORTENED
422-47-012 PRIMARY COOLING INLET Lengthened
751-02-016 U-JET RECIRC ASSEMBLY
U-JET RECIRC ASSEMBLY (With Nozzles)
U-CHANNEL SPRAY NOZZLE KIT Includes Nozzles
SPIRAL NOZZLE
548-64-002 TRI CLOVER CLAMP
513-64-001 SCRUBBING TOWER 4″ O-RING
811-03-015 COOLING/SCRUBBING TRANSITIONSECTION (PFA)
4″U COOLING/SCRUBBING TRANSITIONSECTION (PFA) 4″ U
116-08-001 SWITCH LIQUID LEVEL
422-59-005 SLOPE DRAIN
U-CHANNEL DRAIN ASSY W/FLANGE
U-CHANNEL DRAIN ASSY 90, 1.5″
511-24-001 KF40 CENTERING O-RING
548-24-001 KF40 CLAMP
548-16-002 KF25 CENTERING O-RING
548-16-001 KF25 CLAMP
811-05-001 CONDUCTIVITY LIQUID LEVEL SENSOR ASSEMBLY
425-58-005 DEMISTER SCREEN 3 5/8″ PFA
753-12-001 SECONDARY SCRUBBER PACKING
425-58-004 LOWER PACKING CARTRIDGE SS (PFA)
425-58-003 LOWER SECONDARY SCRUBBING TOWER (PFA)
751-02-006 SECONDARY COOLING/SCRUBBING SPRAY NOZZLE
548-32-003 KF 50 CENTERING O-RING
814-06-008 KF 50 FLANGE UPPER ASSEMBLY
548-32-001 KF 50 QUICK DISCONNECT CLAMP
811-02-005 RTD PROBE WITH FITTING
425-58-007 PFA COATED TOWER DEMISTER MF 100
425-59-001 PFA COATED NPT FLANGE
814-06-011 PFA CARTRIDGE ASSEMBLY
535-02-022 ORIFICE, .070 1/8″ NPT
814-06-009 KF 50 FLANGE ASSEMBLY LOWER W/TANK
813-59-012 BLADE RCCM WELD W/FASTENERS
543-08-005 WASHER, #8 LOCK TITANIUM
422-58-006 FLANGE, PLATE
542-06-005 SCREW, 8-32 X 3/8
421-58-001 BEARING TEFLON UPPER
422-58-004 GEAR, CLEANING MECHANISM
553-32-001 CYLINDER, 2″ DBL ACTING
581-04-008 ELBOW, 1/4 X 1/4 MALE
813-59-003 PUSHROD ASSEMBLY
421-58-002 BEARING, TEFLON LOWER
422-58-007 FLANGE, HOUSING
542-08-012 BOLT, 8-32 X 1/2 TITANIUM
422-58-006 FLANGE, PLATE
162-06-003 SENSOR EXH TEMP 50 DEGREE C
525-10-003 CONNECTOR 5/8 X 1/2 MALE NPT
552-02-011 REGULATOR 5 PSI PRESET
151-02-002 SOLENOID 24V N/O (N2)
533-50-001 N2 ROTOMETER
151-24-018 SOLENOID 24V N/C
151-10-001 SOLENOID 24V VOLT 4 WAY
151-24-003 SOLENOID 24V N/C (CDA-O2 SOURCE)
113-08-003 FRESH WATER FLOW SWITCH
215-08-004 AIR OPERATED N/C WATER VALVE
532-04-001 FRESH WATER FLOW INDICATOR TANK
215-08-007 1/2″ SWING CHECK VALVE
215-08-006 TRUE UNION BALL CHECK VALVE 1/2″
152-16-012 SUMP PUMP MOTOR TE-5 WITH HEAD
152-24-010 SUMP PUMP HEAD TE-5 ASSEMBLY
DIAPHRAGM PUMP
116-24-001 N/O LIQUID LEVEL SENSOR
116-24-004 N/C LIQUID LEVEL SENSOR
LIQUID LEVEL SENSOR
752-16-002 HEAT EXCHANGER
210-24-001 Y STRAINER CARTRIDGE
152-24-015 PUMP HEAD RECIRC TE-7
152-24-012 RECIRC PUMP TE-7 WITH HEAD
812-16-004 WATER FLOW SENSOR /SWITCH RECIRC
532-02-001 WATER FLOW INDICATOR
531-10-001 AIR ROTOMETER 858-02
111-50-001 AIR FLOW SENSOR/SWITCH 60-6
113-20-001 N2 FLOW SENSOR/SWITCH FOR MULTI NOZZLE
113-02-001 N2 FLOW SENSOR/SWITCH FOR SINGLE & DUAL NOZZLE
535-02-001 ORIFICE .003
551-40-005 MAGNEHELIC 2 TO -2″
PHOTOHELIC 2 TO -2
117-02-001 SWITCH PRESSURE PRESET 2.0 WC
117-05-001 SWITCH PRESSURE PRESET 0.5 WC
535-02-022 ORIFICE .070
535-02-023 ORIFICE .035
535-02-003 ORIFICE .012
1/2″ TUBE x 3/8″ NPT, 90 ELBOW
1/2″ TUBE x 1/2″ NPT, 90 ELBOW
1/2″ GRAB RING
1/2″ O-RING
1/2″ NUT
NITRILE O-RING
115-32-004 CONTACTOR, 3 PHASE
125-10-001 FUSE, 10 AMP 250V
125-03-001 FUSE 3 AMP 250V (TE-5)
125-10-001 FUSE 10 AMP (TE-7)
135-42-001 Relay, 3A 120VAC
Relay, 6A 129VAC
153-25-203 6 SLOT BASE 110/220 VAC
153-25-101 DL230 CPU
153-25-302 DIGITAL INPUT MODULE 24VDC 16 POINT
153-25-404 DIGITAL OUTPUT MODULE 16 POINT SOURCING
153-25-503 RELAY OUTPUT MODULE 7 POINT, 7 COMMONS
161-24-005 TEMPERATURE CONTROLLER
121-01-012 858 DOUBLE LEVEL TERMINAL RKD2.5
121-04-014 FEED THROUGH TERMINAL
121-01-011 GROUND TERMINAL
121-01-015 GROUND TERMINAL 6 AWG
134-42-001 RELAYS KHAU1711A-24
114-30-003 BREAKER 30 AMP
125-05-001 .5 AMP 250VAC TIME DELAY FUSE
125-02-003 .25 AMP 250VAC TIME DELAY FUSE
125-06-001 6 AMP 250VAC TIME DELAY FUSE
133-24-001 MERCURY RELAY 24V HG
136-12-001 CONDUCTIVITY RELAY 120V
115-32-001 MAIN TRIP CONDUCTOR
186-04-001 TRANSFORMER 120/220 TO 24 VAC
134-24-002 RELAY, 24 VAC/VDC SPOT DIN RAIL MOUNT
114-02-001 BREAKER 2 AMP
114-15-001 BREAKER 15 AMP
185-24-004 24 VDC POWER SUPPLY
142-24-001 SD ALARM BOARD
133-22-001 T85N11D114-24 RELAY
152-24-019 FAN, COOLING 3 5/8
162-58-001 LIMIT SWITCH
114-40-002 BREAKER 40 AMP GFI (Not Shown)
40A GFCI Breaker with lug plate
Heater wire /per ft
Heater Terminal (High Temp)
12-WIRE CABLE (Sensor Wiring)
Delatech CDO 859 Gas Scrubbers and Parts was last modified: November 2nd, 2016 by admin

Since 1998, Critical Systems, Inc. (CSI) has been providing Gas Cabinet, Valve Manifold Boxes & Gas Abatement Systems (Gas Cabinets and Gas Scrubbers, etc.), and Orbital Welding Rental, Lease, Repair and Training Services related to process tool facilitation for Semiconductor, Biotech, Pharmaceutical and related industries. Company headquarters are in Boise, ID, with additional locations in Burnsville, MN, and Shrewsbury, PA, Austin, TX and Draper, UT.