Gas Cabinets & VMBs
CSI’s Gas Cabinets and VMBs represents the ultimate value for your dollar. All boxes were designed and built by premier gas system OEMs, such as Air Products, for the Semiconductor industry, and adhere to the strictest safety and purity requirements of this industry. These gas systems were installed, ran and have been subsequently decommissioned by industry professionals, and are in excellent condition.
CSI procures these systems and puts them through an in-depth inspection procedure to assure all components are in functional order. All controllers and components are tested, cleaned and if necessary replaced then given the CSI stamp of approval.
When you place your order for your cabinets or VMBs, we select the gas systems that best fit your needs and modify these for the gases you’re going to be using. Components are replaced and/or calibrated, and the gas systems are set up so they are capable of meeting your needs. When it is time for installation, we enlist Air Products technicians to perform your Start Up with and in depth 38 point check list and on site, will modify the Controller software to run the gases you desire. The result is a Gas Cabinet or VMB that performs flawlessly at a price up to 50% off that of new equivalent equipment.
Need assistance with the design or installation of your gas system? CSI contracts Air Products technicians for Site Evaluations and Design Review meetings.
Let the experts at Critical Systems assist you in the design of your process gas distribution system. From the gas cabinets to the process tools, we have the expertise to provide the most advanced gas system at a price that won’t break your budget.
STANDARD PIPING FEATURES:
- Customer configured options
- 316L stainless steel electropolished
- components and tubing
- Low internal volume panel design
- Orbitally butt-welded construction
and face seal breaks
- Optimized component layout
- Vacuum-assisted purging
- Flow-through pressure sensors
- For your safety, all Silane & Disilane
- Systems are CGA G13 complaint
CABINET PANEL FEATURES:
- Deep-purge or cross-purge pigtails
- Excess flow switches as needed
- Filter and purifier options
VMB PANEL FEATURES:
- Standard stick design for interchangeability
- Modular for future expandability
up to eight sticks
- Pneumatic valves for automatic
start/stop/optional purge
- Excess flow switches per stick
(optional)
- Pressure transducers located on
each process stick
- Pressure regulator options
- Filtration options
STANDARD CONTROLLER FEATURES:
- Simplified 22 key operator keypad
- Configurable software
- Laptop interface
- Pneumatic solenoids
- Expandable Input/Output
- Multiple levels of security access
- 8 line by 40 character LCD display
& Static, inserted flow graphic
(AP2 Controllers)
- 10.4″ color, 10.4″ high-contrast
electrolumicant or 9.4″ monochrome
display & dynamic, real time graphics
(AP3 Controllers)
Click on the following links to see our galleries:
Preparing your cabinet for shipment gallery
“CALL TODAY FOR A QUOTATION”
CSI’s Gas Cabinets and VMBs represents the ultimate value for your dollar. All boxes were designed and built by premier gas system OEMs, such as Air Products, for the Semiconductor industry, and adhere to the strictest safety and purity requirements of this industry. These gas systems were installed, ran and have been subsequently decommissioned by industry professionals, and are in excellent condition.
CSI procures these systems and puts them through an in-depth inspection procedure to assure all components are in functional order. All controllers and components are tested, cleaned and if necessary replaced then given the CSI stamp of approval. When you place your order for your cabinets or VMBs, we select the gas systems that best fit your needs and modify these for the gases you’re going to be using. Components are replaced and/or calibrated, and the gas systems are set up so they are capable of meeting your needs. When it is time for installation, we enlist Air Products technicians to perform your Start Up with and in depth 38 point check list and on site, will modify the Controller software to run the gases you desire. The result is a Gas Cabinet or VMB that performs flawlessly at a price up to 50% off that of new equivalent equipment. Need assistance with the design or installation of your gas system? CSI contracts Air Products technicians for Site Evaluations and Design Review meetings. Let the experts at Critical Systems assist you in the design of your process gas distribution system. From the gas cabinets to the process tools, we have the expertise to provide the most advanced gas system at a price that won’t break your budget. STANDARD PIPING FEATURES:
CABINET PANEL FEATURES:
VMB PANEL FEATURES:
STANDARD CONTROLLER FEATURES:
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Click on the following links to see our galleries:
![]() “CALL TODAY FOR A QUOTATION”
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