Gas Scrubbers

To excel as the world’s leading supplier of rebuilt and new abatement equipment by providing advanced technology and services of the highest quality which ensures long term customer satisfaction.

CSI’s Scrubber Offering:

Resin Cartridge Gas Reactor Column Scrubbers provide abatement of toxic and corrosive gases without the need for waste treatment

Reconditioned Delatech 859 with Water Recirculation minimize water consumption while providing Abatement for most gases.

Reconditioned Delatech 859 with Cascade Single Pass Water Scrub provides Abatement for most gases while minimizing maintenance of the scrubber.

Process Tool Exhaust Abatement Systems:

Save Thousands Over the Price of New!
CSI purchases only the highest quality Gas Scrubbers, and using our proprietary process, reconditions them to perform as new.

Once ordered, CSI prepares your Scrubber order for your Gases, Flow Rates and Process Conditions.

Systems are completely Disassembled, Cleaned and Completely Refurbished. Hard to find parts have been sourced and stocked to assure availability. Once reassembled, all processes, alarms and functions are Tested to assure your scrubber performs as new.

Our “After the Sale” Warranty Packages and Support provides peace of mind that you are buying a quality system from a well established, reputable company.

CSI’s Reconditioned Scrubbers:

Fully integrated thermal destruction, liquid scrubbing system.

Engineered for effectively treating the by product corrosive, combustible and toxic gasses from high purity process tools before they can damage the exhaust ductwork and facility scrubber.

Designed and built by leading edge OEMs, such as Delatech & Edwards, for the needs of the Semiconductor industry.

Adhere to the strictest safety, Semi, and CE requirements of this industry.

CSI’s Reconditioned Delatech 859:

STANDARD FEATURES:
• Available with 1, 2, or 4 inlet nozzles.
• Thermal Reaction Chamber features a resistive heating element.
• Primary and Secondary wet cooling/scrubbing sections.
• Demister Washing System provides automatic cleaning.
• Exhaust Moisture Suppression System.
• Liquid level detection.
• Tool interlocks to process tools.

AVAILABLE OPTIONS:
• Cooling/Scrubbing Recirculation
• Sump Pump.
• Cabinet Exhaust Alarm

CSI’s Reconditioned Delatech 859:

Design Services:
• CSI’s Engineers can design your Abatement system so your gas system performs as intended

Warranties:
• Standard 6 Month Warranty
• 1 Year Extended Warranty

On-Site Start Up & Training:
• CSI’s Field Service Engineers perform start up and training
• In-Depth 20 point Check List performed on site to assure your scrubber is operating as required