TEOS Liquid Delivery System

The TriChem™ Chemical delivery system supports the supply of both TEOS and Dopants/Precursors in a single system with up to four (4) independently controlled/maintained outputs. Our unique design utilizes a fixed TEOS reservoir which feeds the outlets and a replacement source tank that refills the fixed reservoir. This allows the system to operate continually without the need to re-qualify the delivery system when new chemical is added.

ADVANTAGES:
– Supplies Three (3) Chemicals to up to Four (4) Tools/Chambers with Independent Operation & Maintenance
– Continuous TEOS/Primary Chemical Supply eliminates Process Requalification after Tank Changes
– Compatible with Multiple Tool Types
– Compatible with Multiple Source Containers

Download CSI TriChem Spec Sheet 2016 NV6 TEOS System Facility & Utility Connections 020412

Download NV6 TEOS System Facility & Utility Connections 020412

 

2016-08-03_1106DESIGN & OPERATION:

TEOS/Primary Chemical:Fuel Tank and Outlet Detail
– 5 gallon source tank feeds 3 gallon fixed tank.
– 3 gallon fixed tank automatically refills to maintain 45% level.
– Source tank exchange does not affect chemical delivery to host tools/chambers. Manual valve control for tank exchanges.

Dopants:
– Supports 2 Dopant source containers up to 2 gallon
– No fixed tanks. Dopant source tanks are changed when the process is idle. Manual valve control for tank exchange

Level Monitoring & Control:
– Discrete controller monitors fixed tank levels and automatically refills tank as needed
– Scale monitors and displays source tank weight
– Dopant container levels monitored by level sensor interface or scales (for 1 gal and larger tanks)

Chemical Distribution:Distribution & Degas Module Detail
– Distribution manifolds have dedicated chemical and inert gas purge valves
– Each branch operated independently from the others.
– Each outlet can be fitted with an optional degas module.

Tool & Facility I/O:
– Controller has DI/DO port for each outlet. DI tool permissive contact signal controls chemical supply
from System. DO signals include chemical levels and general system status fault.

 

CONFIGURATION OPTIONS SPECIFIED AT TIME OF ORDER:

Undoped TEOS: 2-outlet (Standard), 4-outlet (Optional). Continuous TEOS dispensing.
Doped TEOS: 2-outlet (Standard), 4-outlet (Optional). Continuous TEOS dispensing. 5-gal TEOS Source (User Supplied). Two source Dopant containers 1.2-liter to 2-gallon (User Supplied). Dopants are not continuously delivered.
Degas Module Option: Each outlet is configurable with a degas module (Added Cost Option)
– Dopant Level Monitoring:
. Direct interface to float switch level sensors that close on decreasing level.
. Direct interface to Air Products-Schumacher Type “SSN” Containers with quartz optical level sensor probes (Added Cost Option)
. Scales (Added Cost Option. Not suitable for containers less than 1 gallon volume.)
Source Tanks & Ampoules: Available upon request at additional cost.

 

SPECIFICATIONS:

Mechanical
– Dimensions H x W x D, in. (cm): 78” (198) x 30” (76) x 18” (46)
– Clearances, in. (cm): Front 48” (122), Sides 4” (10), Top 24 (61)
– Spill Containment Volume: 11 gal (41.6 liters)

Utility Requirements
– Electrical: 100-240 VAC, 50/60 Hz, 750mA max.
– Enclosure Exhaust: 85 CFM, -0.03 in. H2O duct static pressure, (6” duct)
– Process Helium: 85 psig min., 20 slm max flow rate
– CDA: 85 psig min., 2 slm max flow rate
– General N2 (Vacuum Generator): 80 psig, 20 slm max flow
– Vacuum source for degasser
SD4-C CONTROLLER DETAIL:

Power: 100-240 VAC, 50/50 Hz, 750 mASD4-C Controller
Control Inputs:
– Source Tank Scale/Level switches
– Fixed Tank Leels: (4 Levels)
– Spill Sensor
– CDA Pressure
– Helium Push/Purge Gas Pressure Controls:
– Degasser Vacuum – Auto Fill On-Off
– Degasser Liquid Leak – Manual Fill Pushbutton
Chamber I/O: – Reset Sonic Alarm
– Source A, B, C Level Empty Output Display:
– TEOS System OK Output – Source A (TEOS) Tank Weight (kg), Color changing display (Grn
– Chamber OK Input – Source A, B, C Low & Empty
Facility I/O: – Fixed Tank Level / Filling Status
– Source A, Level Low & Empty Outputs – System Status
– External Shut-Down Input • CDA, Inert Gas, Degas Vacuum
– System General Warning Output • Chem Spill, Degas Leak, Status (GRN, YEL, RED)
– System General Fault Output • Tool (Chamber) 1-4 Permissive Status
Controls:
– Auto Fill On-Off
– Leak – Manual Fill Pushbutton
– Reset Sonic Alarm
Display:
– Source A, Level Low & Empty Outputs – System Status
– Source A, B, C Low & Empty
– Fixed Tank Level / Filling Status
– System Status
. CDA, Inert Gas, Degas Vacuum
. Chem Spill, Degas Leak, Status (GRN, YEL, RED)
. Tool (Chamber) 1-4 Permissive Status

 

csm-nv6-teos-system2 csm-nv6-teos-system1

TEOS Liquid Delivery System was last modified: August 4th, 2016 by admin

Since 1998, Critical Systems, Inc. (CSI) has been providing Gas Cabinet, Valve Manifold Boxes & Gas Abatement Systems (Gas Cabinets and Gas Scrubbers, etc.), and Orbital Welding Rental, Lease, Repair and Training Services related to process tool facilitation for Semiconductor, Biotech, Pharmaceutical and related industries. Company headquarters are in Boise, ID, with additional locations in Burnsville, MN, and Shrewsbury, PA, Austin, TX and Draper, UT.