CSI’s Photovoltaic Gas Boxes and VMBs represents the ultimate value for your dollar. All boxes were designed and built by Air Products for the Semiconductor industry, and adhere to the strictest safety and purity requirements of this industry. These boxes were installed, ran and have been subsequently decommissioned by industry professionals, and are in excellent condition.
CSI procures these systems and puts them through an in-depth inspection procedure to assure all components are in functional order. All controllers and components are tested, cleaned and if necessary replaced and given the CSI stamp of approval. From there the gas boxes are modified for the gases found in the Photovoltaic industry. Components are replaced and/or calibrated and software is reconfigured so the gas systems are capable of providing gases to thin film and polysilicon photovoltaic processes. The result is a gas box or VMB that performs flawlessly at a price up to 50% off that of new equivalent equipment.
Let the experts at Critical Systems assist you in the design of your process gas distribution system. From the gas cabinets to the process tools, we have the expertise to provide the most advanced gas system at a price that won’t break your budget.
AIR PRODUCTS ASSISTANCE:
Critical Systems uses Air Products for on-site start up and gas system support. This unique relationship allows your company to invest in our systems in full confidence knowing that your gas system will be dialed in by certified Air Products technicians. Additionally, the network of Air Products service technicians spans the globe, so wherever you may expand to, you’ll know that factory support is always just around the corner.
SPECIFICATIONS:
ORIGINAL MANUFACTURERS:
Air Products & Others
GAS BOXES & VMBs FOR:
Inert Gases*:
N2 . Ar . O2 .H2 . He
Specialty Gases*:
SiH4 . NF3 . NH3 . HSiCl3 . CH4
GeH4 .Other
Dopants*:
PH3 . B2H6 . B(CH3)3 . BF3
Other gases available on request
STANDARD FEATURES:
- Mass Flow Controllers reconfigured for Photovoltaic gases
- Orbital butt-welded construction and faceseal breaks.
- 6″ Exhaust w/ Exhaust Switch
- Vacuum assisted purging
- Flow through pressure sensors
- UVIRs & Temp Sensors for Off Tool VMBs
- ESO Switch on VMBs
OPTIONAL FEATURES:
- LCD Controllers
- Static, inserted flow graphics
- Simplified key operator key pad
- Configurable software
- Expandable input/output
- Multi-level security access
- Time stamped alarms
- BUS System Compatibility
Valve manifold boxes, Valve manifold panels, gas sticks:
Should your project call for VMBs, Gas Panels or Gas Sticks, the professionals at CSI have the experience to produce a product that meets your specifications and saves you money at the same time. We have over 50 years of gas delivery experience which allows us to offer design build or print from drawings.
VMBs, VMPs and Gas Sticks all utilize the same principles. A gas enters the product, is regulated, controlled and delivered to a specific point in the gas delivery system. A combination of valves, regulators and pressure sensing devices are included to achieve the end result. From there, the systems are scaled up to meet the demands of your particular project.
A Valve Manifold Box(VMB) typically sits away from the process tool and has a controller that allows it to perform as needed. The controller will monitor the gas and condition it to perform it’s intended function. They are typically safety related sensors to determine gas leakage, exhaust flow rate and fire suppression. The components in the cabinet usually consist of valves, regulators, pressure sensor (most common are transducers) and sometimes filtration. Multiple gases enter this box, and leave this box to go to a final destination. These are common in larger fabs with multiple tools, where the gas control is all located in a central are.
A Valve Manifold Panel (VMP) is located either on, or in the immediate vicinity of the process tool. It is here that the gas is controlled to the setpoints required by the process it feeds. This panel typically does not have a controller, but instead feed it outputs and receives inputs from the process tool itself. Typical components consist of valves, regulators, mass flow devices, pressure sensors and filtration. The gases leaving this panel are at the exact pressure and flowrate as desired by the process. As with VMBs, multiple gases enter this panel and leave this panel.
We see a significant number of other panels that are called Splitter Boxes. A Splitter Box is used when several tools need the same gas and are fed from a single source. These boxes typically have a single gas line entering the box with a pressure gauge to allow the inlet pressure to be viewed. From there the gas is split into multiple lines to go to the various processes. We have provided splitter boxes that are as simple as a single gas in and two gases out with a valve on each. We have also provided large Splitter Boxes with 8 or more gas lines leaving the box to go to their required destinations. There is almost always a valve, a regulator and an outlet gauge on each line within the box.
Gas Sticks are manual single gas control assemblies set up for maintenance to assure that the gas is at the correct pressure before it goes to the VMP. There are several types of gas sticks, but they all consist of basically the same components. There is a manual valve, a regulator, and a pressure gauge. Options would be an outlet manual valve and a filter. Different Gas Sticks are made for inert services, spec gas services, and both high and low flow needs.
CSI can provide any of these as either new, reconditioned or as is devices. Our inventory is huge and we can usually deliver these reconditioned with just a few day’s notice.
Unsure as to what you need? Allow us to help. We provide free gas system analysis to determine your exact needs beforehand, and they provide the perfect combination of gas delivery devices to bring you project in on-time and under budget. We will analyze your project’s scope and recommend the optimal VMBs, VMPs, Splitter Boxes and Gas Sticks so your gas is delivered to the tool at the correct pressure, temperature, quality and flow rate.
