Do you guys integrate in-line filters into gas cabinets? Is there a requirement to provide an exhausted enclosure around point of use filters at the tool?

There is an envelope area around the tool where you do not need to put items in an exhausted enclosure.  See photo below for what the back of the tool looks like – you’ll note the exposed mechanical connections within the tool’s envelope.   As you can see, you couldn’t put all this in an exhausted enclosure without enclosing the entire back end of the tool.   Filters make more sense at the tool.    In fact, there may already be filters on the gas boxes at the tool.  It is very common for the OEMs to put filters here as it is cheap insurance for them to assure their tools receive particulate free gas.

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Re: your other question, no, filters are not typically added in gas cabinets.  There is a section where they can be added, but few people want them in the cabinet, so we don’t put them there.  Filters should almost always reside at the tool.  A lot of people put purifiers at the tool in lieu of filters (the purifiers can have filters integral to them).   The reason is two-fold:  First, this is where the gas enters the tool, and only the tool cares about the molecular contaminants and size of particles that will exist here (unless you have larger particles, such as metal shavings from a poorly blown out section of tube during installation, but these usually hold up on a regulator seat or somewhere else where they cause issues).  Second, treating the gas at the point of use means that the flows will be lower, so you don’t need as large (more expensive) of a filter or purifier.

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