[Full Question:] I work for a solar company and am wondering what kind of gas scrubbers are recommended to be used at the tool (not a big facility scrubber).
Answer: The flows for solar, PV, or LED processes are usually pretty high so the biggest thing is to make sure that the point-of-use scrubber can handle the flow. Second thing is the type of gas which will usually be either H2 ro NH3. If it’s H2, then a Guardian scrubber is my recommendation. For NH3 gas, then people usually go with a Vector point of use scrubber.