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We have a new tool requiring WF6 (Tungsten Hexafluoride). Can I use a 3 stick valve manifold box in the line to feed the 3 chambers?

By admin |

Delivering Tungsten Hexafluoride to a process tool can be tricky.  We’ve seen a few gas delivery system installations that have taken some effort and attention to detail to set up correctly.  Here are my suggestions:

  • Keep the gas cabinet within 50 feet of the tool
  • Chill the gas cylinder to 17ºC to stabilize the vapor pressure, and then heat the lines to the tool
  • Set the delivery pressure at -1.5 psia at static in the gas cabinet
  • The cylinder pressure should be 3 to 4 psia
  • To avoid sucking liquid into the lines, don’t go above -1.5 psia at static
  • Use 3/8″ tubing and components after the gas cabinet to point of connection with the process tool
  • Don’t put regulators in the valve manifold box (VMB)
  • Shouldn’t need to heat trace inside the VMB, BUT do so from the gas cabinet to the VMB, and the VMB to the tool.    72 – 75º from Cabinet to VMB;  80 – 85º from VMB to the tool
  • With a new gas bottle, there isn’t sufficient head to run 3 chambers, and you need to be careful not to suck liquid into the gas lines.  Chilling helps here.
  • Initially run all 3 chambers when you get a new bottle installed to verify gas flows on initial start up.  This will also verify the -1.5 psia at static setting on the standby regulator

Would be happy to talk through this a little further.  Call me (Tom Britton) at 208.890.1417

We have a new tool requiring WF6 (Tungsten Hexafluoride). Can I use a 3 stick valve manifold box in the line to feed the 3 chambers? was last modified: April 16th, 2014 by admin

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Since 1998, Critical Systems, Inc. (CSI) has been providing Gas Cabinet, Valve Manifold Boxes & Gas Abatement Systems (Gas Cabinets and Gas Scrubbers, etc.), and Orbital Welding Rental, Lease, Repair and Training Services related to process tool facilitation for Semiconductor, Biotech, Pharmaceutical and related industries. Company headquarters are in Boise, ID, with additional locations in Burnsville, MN, and Shrewsbury, PA, Austin, TX and Draper, UT.