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11 Jun

Posted at 15:20h in Ask an Expert
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[Full Question:]   I work for a solar company and am wondering what kind of gas scrubbers are recommended to be used at the tool (not a big facility scrubber). Answer:   The flows for solar, PV, or LED processes are usually pretty high so the biggest thing is to make sure that the point-of-use scrubber can handle the flow.    Second thing is the type of gas which will usually be either H2 ro NH3.    If it's H2, then a Guardian scrubber is my recommendation.   For NH3 gas, then people usually go with a Vector point of use scrubber....

28 May

Posted at 16:22h in Ask an Expert
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[Full question here] We are bidding the installation of either a Plasmatherm or Novellus Silicon Nitride tool, and I need to include a price for gas cabinets and a scrubber in the bid. What do I need?  The gases are SiH4, NH3 and N2. Answer:   The process your customer will most likely run will be a PECVD process that uses these gases. While different process recipes vary and you should find out the flow rates to confirm, a typical Silicon Nitride Etch process will use well under a liter a minute of silane and ammonia. The nitrogen will be used in...

16 Apr

Posted at 09:23h in Ask an Expert
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Delivering Tungsten Hexafluoride to a process tool can be tricky.  We've seen a few gas delivery system installations that have taken some effort and attention to detail to set up correctly.  Here are my suggestions: Keep the gas cabinet within 50 feet of the tool Chill the gas cylinder to 17ºC to stabilize the vapor pressure, and then heat the lines to the tool Set the delivery pressure at -1.5 psia at static in the gas cabinet The cylinder pressure should be 3 to 4 psia To avoid sucking liquid into the lines, don't go above -1.5 psia at static Use 3/8" tubing and components after...

13 Feb

Posted at 16:35h in Industry Advancements
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Over the last two years, a record number of new solar photovoltaic (PV) systems have been installed in homes and businesses across the U.S.  Sliding prices for solar modules and an accelerated pace of the acceptance of solar panels for electric generation have generated demand, especially for distributed solar systems. The price per watt for solar panels has fallen about 70 percent since 2010, according to the Solar Energy Industries Association (SEIA). This price declined has been a key factor in the efforts to achieved price parity with traditional fuel sources, which has been reached in some markets. Distributed Solar System Cost...

09 Jan

Posted at 12:25h in Industry Advancements
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The $2.2 billion Ivanpah power station, jointly-owned by NRG Energy, Inc., BrightSource Energy, Inc. and Google, produced it first output of electricity on September 24, 2013.  Employing concentrating solar power (CSP) technology, the power plant uses 153, 500 giant mirrors to focus sunlight giant mirrors to reflect and concentrate into three 45-story towers.  The sun rays are converted into heat or thermal energy that boils water. This powers a turbine or heat engine to generate electricity. Although optional, one of the primary advantages of CSP over PV power stations relates to its capability to store power and distribute electricity on cloudy days or at night.   There is one...

02 Jan

Posted at 16:20h in Ask an Expert
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This is from the effluent gases left over from the process. As soon as the effluent cools, it starts to condense, which can cause a big problem over time.  You can try heating the pipes (1) to the pump and (2) to the POU scrubber to minimize this.  The best place for your gases to condense is at the gas scrubber, which can be cleaned during the scheduled preventative maintenance (PM)  .    From what I’ve seen, a well running  Edwards scrubber (ideal for Etch processes) seems to be best POU scrubber for minimizing build up....

20 Dec

Posted at 14:55h in Orbital Welding
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We have seen a quiet shift from the traditional hand TIG welding to the use of orbital welding machines in pharmaceutical and food/ beverage industries. Although orbital welding has been around for over 50 years, some process piping contractors are only recently showing clients that orbital welding is not just for the semiconductor industry. We have been renting tube prep equipment and orbital welding machines to quality process piping contractors who want their pharmaceutical or food/beverage customers to see the same weld quality and consistency.  Once a customer sees a quality orbital weld, they tend to start specifying the process...

19 Dec

Posted at 14:46h in Industry Advancements
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Citing the need for  the  federal government to “ lead by example” to combat global warning and make the transition to a clean-energy economy, President Barack Obama released a memorandum that directs the U.S. federal government to pursue the objective of obtaining 20% of its energy from renewable sources by 2020. The dispatch also provided detailed steps all federal agencies must take to improve energy efficiency reduce energy waste and enhance building performance, The directive is a follow up to the President’s announcement in June of his plans to combat climate change.  Federal agencies must follow specified, approved actions designed to...