TEECalcII is a custom program tailored to energy studies for semiconductor manufacturing equipment but has also been used to characterize entire Assembly/Test processes.  It’s available to anyone at www.teecalc.com.    The program has an extensive manual that walks the user through the application.  Simply, it requires defining equipment components and then associating those components into equipment or “tools”, e.g. power supply + vacuum pump + point of use abatement + chamber = dry etcher.  Flow rates and utilization (processing vs. idling vs. shutdown) are the inputs. There are ~ 250 registered users across the globe. Ralph M Cohen (RalphCohenConsultancy) was a...

For fab managers in semi-conductor and photovoltaic (PV) manfacturing, this is a common question. Going back to the basics, to convey a “high purity” gas, the gas system must be free from contaminants and leaks.  At one time (1970’s) copper tubing was sufficient, then chemically cleaned stainless steel was sufficient (1980’s), but finally electropolishing followed by a hot deionized water final clean was established as the best method to achieve a passive, corrosion resistant, and uncontaminated tubing inner surface. High purity is a relative term – in the semi-conductor electronics industry the specification may allow ppb (part per billion) or ppt (part...

Judging welds for acceptability is somewhat subjective.  There are some generally agreed industry standards such as SEMI F81 for Visual Inspection and SEMI F78 for Gas Tungsten Arc Welding but these are not based on scientific studies correlating weld quality to gas purity.  For the most part they represent what is achievable by a welding technician practicing the state of the art.  The most subjective parameter is oxidation at the heat effected zone. The parameters that are judged are:  penetration, bead width, bead depth and convexity or concavity at the inner wall, bead “meander”, porosity/inclusions/slag, weld bead overlap, consumption of tack...

Thank you for the question.  Good news - all Air Products Gas Cabinets have a section of the plumbing right before the process out where a purifier can be installed. Installation is as simple as closing the manual valve, removing the existing spool, and adding in the Argon Purifier spool. We can provide this assembly if you would like....

Silane (SiH4) Gas is classified as a Pyrophoric, Flammable, High Pressure Gas. Because of the explosive (and often unexplainable) nature of Silane (SiH4), a code has been enacted to provide for it's safe delivery. That Code is CGA Code G-13. Simply stated, G-13 is that section of the International Fire Code that deals with the storage and delivery of Silane gas in concentrations greater than 2%. Specifically in a Silane gas cabinet, you will need the following to be compliant: ·        High Flow Door ·        UVIR infrared flame monitor ·        Regulator bonnet vent kit ·        Restricted flow orifice in the cylinder valve ·        Pneumatic cylinder...

Good question and an important one.  We always recommend the DISS connection for Ultra High Purity applications for the following reasons. First, the DISS connection is a great improvement toward safe bottle change and one of the good common sense practices that has virtually eliminated cross contamination issues. The recommended connection is the 720 DISS for Ammonia (NH3). This connection is unique to the Ammonia (NH3) bottle and that of the “Pig Tail” which connects your high purity bottle to the gas delivery or gas panel in the gas cabinet.  The 720 fitting eliminates the potential to connect the wrong...

The Critical Systems, Inc. Abatement Team has been on the ‘receiving end’ of many troubleshooting phone calls for many years, and recently developed two inexpensive product modifications to address the most frequent problem areas on these scrubbers. “U” Shaped Drain The most common problem with Delatech Scrubbers is sediment buildup in the drain assembly.   This causes abatement inefficiencies, and the need for frequent preventative maintenance cycles.    Unlikie the standard drain, CSI’s “U” shaped design provides a continuous 4” diameter transition section enabling free flow of liquid and sediment into the tank.  The U drain is constructed of corrosion resistant 316L stainless steel,...