02 Jan Our etch process seems to be causing a build-up of material in the pump & exhaust piping on the backside of the tool. What’s causing this?
This is from the effluent gases left over from the process. As soon as the effluent cools, it starts to condense, which can cause a big problem over time. You can try heating the pipes (1) to the pump and (2) to the POU scrubber to minimize this. The best place for your gases to condense is at the gas scrubber, which can be cleaned during the scheduled preventative maintenance (PM) . From what I’ve seen, a well running Edwards scrubber (ideal for Etch processes) seems to be best POU scrubber for minimizing build up.