Are POU Gas Scrubbers needed in a Thin Film Process?

I came from the thin film hard drive (HDD) industry, and we had several point of use scrubbers.  The main ones were the Delatech and dry abatement systems like Novapure (also CS Clean, or the GRC).  The thin film flows are low compared to other processes, but still pose environmental and safety issues if not addressed properly.  In order to pick out the best scrubber, you really need to figure out the max flow of your gases, and consider the individual gas types.   You can then use this information combined with your facilities requirements to determine the best gas scrubber for the application

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