16 Nov Does a process tool running TEOS require a point-of-use gas scrubber?
Yes, TEOS, TEPO is highly flammable and would need point of use (POU) gas abatement. Usually, these are higher flow processes, and need a scrubber to burn these off. What I have seen in the field and typically recommend are Guardians that use a constant flame and burn any combustible gases coming through. Plus, these POU scrubbers are rated for higher flow.