Does a process tool running TEOS require a point-of-use gas scrubber?

Yes, TEOS, TEPO is highly flammable and would need point of use (POU) gas abatement.  Usually, these are higher flow processes, and need a scrubber to burn these off.   What I have seen in the field and typically recommend are Guardians that use a constant flame and burn any combustible gases coming through.   Plus, these POU scrubbers are rated for higher flow.

No Comments

Sorry, the comment form is closed at this time.