Recommended point of use gas scrubber for solar processes?

[Full Question:]   I work for a solar company and am wondering what kind of gas scrubbers are recommended to be used at the tool (not a big facility scrubber).

Answer:   The flows for solar, PV, or LED processes are usually pretty high so the biggest thing is to make sure that the point-of-use scrubber can handle the flow.    Second thing is the type of gas which will usually be either H2 ro NH3.    If it’s H2, then a Guardian scrubber is my recommendation.   For NH3 gas, then people usually go with a Vector point of use scrubber.

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