19 Dec We are starting up a LPCVD process and are looking for a good POU scrubber for this process. What would you recommend?

The point-of use-gas scrubber I’ve seen used the most for LPCVD, CVD and MOCVD are the burn/wet type systems like the Delatech.   These scrubbers burn the flammable gases then scrub what is left with water.