[caption id="attachment_3361" align="alignright" width="232"] Fixed tank and outlet detail[/caption] The MonoChem™ Chemical Delivery System supports the supply of a single chemical in a system with up to four (4) independently controlled/maintained outputs. Our unique design utilizes a fixed chemical reservoir which feeds the outlets and a replacement source tank that refills the fixed reservoir. This allows the system to operate continually without the need to re-qualify the delivery system when new chemical is added. ADVANTAGES: Supplies One (1) Chemical to up to Four (4) Tools/Chambers with Independent Operation & Maintenance Continuous Chemical Supply eliminates Process Re-qualification after Tank Changes Compatible with Multiple...

The TriChem™ Chemical delivery system supports the supply of both TEOS and Dopants/Precursors in a single system with up to four (4) independently controlled/maintained outputs. Our unique design utilizes a fixed TEOS reservoir which feeds the outlets and a replacement source tank that refills the fixed reservoir. This allows the system to operate continually without the need to re-qualify the delivery system when new chemical is added. ADVANTAGES: - Supplies Three (3) Chemicals to up to Four (4) Tools/Chambers with Independent Operation & Maintenance - Continuous TEOS/Primary Chemical Supply eliminates Process Requalification after Tank Changes - Compatible with Multiple Tool Types - Compatible with Multiple...

[vc_row css_animation="" row_type="row" use_row_as_full_screen_section="no" type="full_width" angled_section="no" text_align="left" background_image_as_pattern="without_pattern"][vc_column][vc_column_text] Chemical Delivery Systems CSI’s TriChem™ & MonoChem™ Chemical Delivery System are simply designed, easy to use liquid delivery systems for chemicals such as TEOS and Dopants that provide reliable delivery of liquid to your processing tools. Available as a single liquid system (MonoChem™) or with the ability to deliver three (3) liquids from the same cabinet (TriChem™), our systems feature DTLR Technology (Dual Tank – Liquid Refill) which utilizes a fixed chemical reservoir to feed the outlets and a replaceable source tank that refills the fixed reservoir. This allows the system to operate continually without...