The upsized version of the Callisto is designed for high volume MOCVD reactors that use Arsine and Phosphine flows in excess of 10 slpm. Features media beds free of carbon for low temperature hazardous gas removal, even with high flow hydrogen present. Made in the USA!...

[vc_row css_animation="" row_type="row" use_row_as_full_screen_section="no" type="full_width" angled_section="no" text_align="left" background_image_as_pattern="without_pattern"][vc_column][vc_column_text el_class="h3products"] EXHAUST GAS SCRUBBER ABATEMENT SYSTEMS Through our experience working with specialty gases in high production Semiconductor Fabs, we have learned first-hand that process tool recipes call for different mixtures of gases that require unique abatement solutions for effective destruction. Abatement technologies that are effective at removing flammable gases, for example, may not at all be effective at removing corrosive gases. For this reason, CSI does not take a “one-technology” approach to gas abatement, but rather employs a variety of technologies, such as Wet, Thermal/Wet, Burn, and Dry Bed systems, that are selected to...

To Purchase Replacement Canisters for All Manufacturers of Dry Bed Scrubbers or to Purchase New Dry Bed Scrubbers, call 877-572-5515. Mention Discount Code: “10offDry” for a 10% Discount on your first order. Critical Systems’ Callisto Dry Scrubber is a highly advanced Abatement System that provides Guaranteed scrubbing of the Target Gases to levels well below the (TLV) Threshold Limit Values. With medias blended specifically to the gases and flow rates of your unique process applications, the Callisto utilizes both Chemisorption and Catalytic medias to assure the maximum abatement of the process gas stream.    Custom blending also ensures that adsorbents are not...

Europa Technology: Jupiter Scientific’s Europa Dry Scrubber is a point-of-use facility exhaust treatment system with a broad range of process gas scrubbing capability. The Europa scrubber employs Jupiter Scientific's Europa Scrubbing Canisters to offer the lowest emissions of any scrubber available today. In all cases where the Europa is employed it offers guaranteed scrubbing of the target gases to levels below Threshold Limit Values. The Europa operates in a totally passive mode at ambient temperature . Dry chemical resins efficiently react on contact with process gases and by products, converting them to non-volatile solids. Advanced scrubbing capabilities, combined with multiple levels of...

Europa Technology: Jupiter Scientific’s Europa Dry Scrubber is a point-of-use facility exhaust treatment system with a broad range of process gas scrubbing capability. The Europa scrubber employs Jupiter Scientific's Europa Scrubbing Canisters to offer the lowest emissions of any scrubber available today. In all cases where the Europa is employed it offers guaranteed scrubbing of the target gases to levels below Threshold Limit Values. The Europa operates in a totally passive mode at ambient temperature . Dry chemical resins efficiently react on contact with process gases and by products, converting them to non-volatile solids. Advanced scrubbing capabilities, combined with multiple levels of...

Olympus Technology: Jupiter Scientific’s Olympus Dry Scrubber is a point-of-use facility exhaust treatment system with a broad range of process gas scrubbing capability. The Olympus scrubber employs Jupiter Scientific's custom blended medias to offer the lowest emissions of any scrubber available today. In all cases where the Olympus is employed it offers guaranteed scrubbing of the target gases to lev-els below Threshold Limit Values. The Olympus operates in a totally passive mode at ambient temperature . Dry chemical resins efficiently react on contact with process gases and by products, converting them to non-volatile solids. Advanced scrubbing capabilities, combined with multiple levels of...

Callisto Technology Jupiter Scientific’s Callisto Dry Scrubber is a highly advanced Abatement System that provides Guaranteed scrubbing of the Target Gases to levels well below the (TLV) Threshold Limit Values. With medias blended specifically to the gases and flow rates of your unique process applications, the Callisto utilizes both Catalytic and Chemi-sorption medias to assure the maximum abatement of the process gas stream. Custom blending also ensures that adsorbents are not poisoned or fouled since potential poisons and fouling agents are removed before they can harm the media. The Callisto’s sophisticated control system operates the canisters to peak efficiencies to assure the...

Ganymede Technology [caption id="attachment_2927" align="alignright" width="320"] GANYMEDE 350 shown here.[/caption] Jupiter Scientific’s Ganymede water scrubbers come in sizes ranging from point of use process tool devices in a small footprint for small applications through applications as large as 2000 CFM area scrubbing tasks. Our Ganymede water scrubbers feature chemical injection, integrated lift capability (so no lift station is needed), a host of safety interlocks, and industry leading destruction and removal efficiency that delivers non-detect at the discharge. All of this comes in a remarkably small package that conserves your factory space. Ganymede water scrubbers also deliver the most sustainable abatement in the...

The Guardian 4 and 8 Series scrubbers are point of use emission abatement tools designed to thermally oxidize residual process gases (silane, arsine, phoshine, diborane and others) and process by-products in the effluent streams from manufacturing processes.  The Guardian combustion chamber ensures ignition of flammable gases and prevents silane bubble formation for most concentrations and flow rates. Guardian scrubbers generally handle higher flow than other Point of Use (POU) scrubbers, and the 8 series gas scrubbers are typically used for higher process flow rates than the 4 Series.   Because of the high flow feature, we have spec'd many Guardian Scrubbers...