The Delatech Model CDO 859 (Controlled Decomposition Oxidation) Exhaust Gas Scrubbers utilize a combination Thermal Oxidation Chamber and a Primary/Secondary Cooling Wet Scrubbing Chamber to effectively abate toxic, flammable and corrosive gases.

Critical Systems purchases, from CSI approved sources, high quality scrubbers that have been properly maintained and professionally de-commissioned. Once received, each unit is completely reconditioned to perform as flawlessly. Every reconditioned scrubber is backed with our “As-New” warranty.

DELATECH CDO 859 RECONDITIONING PROCESS

• Thermal Chamber & Wet Scrub Assembly is Removed, Decontaminated and Cleaned Internally and Externally.
• All Spray Nozzles are Checked for Proper Flow Rate and then Re-positioned for Optimum Coverage.
• All Scrubber Balls are Cleaned and/or Replaced.
• All O-Rings & Seals are Cleaned and Replaced Where Necessary.
• The Recirculation Unit is Cleaned and Components Checked for Functionality.
• The CDO is Reassembled, Tested for Functionality and Sensor and Alarms are Checked for Correct Operation.
• The CDO is then Tested at Full Temperature for 24 Hours to En-sure Good Working Order.

The Delatech CDO 859 abatement unit has long been considered the standard for Advanced CVD Process Abatement, and has been effectively used with all PECVD, LPCVD & MOCVD Gases. The model 859 CDO is available with 1, 2, or 4 independent inlet nozzles, allowing connection of up to 4 process chambers, process tools, or vacuum pumps to the CDO.

Delatech CDO Selection Criteria

• Mixture of Gases
• Individual & Total Gas Flow Rates
• Duty Cycle
• Single Pass or Water Recirculation
• Number of Ports Desired ( 1 – 4 )
• Desired Options

CSI has also developed many practical component level modifications for Delatech Scrubbers.  These components are stocked and readily available.