Contact Us: (877) 572-5515 7000 West Victory Rd. Boise, Idaho 83709
Boise’s Manufacturing Quality Management System is ISO 9001:2015 Registered by EAGLE Registrations Inc.
The Delatech Model CDO 859 (Controlled Decomposition Oxidation) Exhaust Gas Scrubbers utilize a combination Thermal Oxidation Chamber and a Primary/Secondary Cooling Wet Scrubbing Chamber to effectively abate toxic, flammable and corrosive gases.
Critical Systems purchases, from CSI approved sources, high quality scrubbers that have been properly maintained and professionally de-commissioned. Once received, each unit is completely reconditioned to perform as flawlessly. Every reconditioned scrubber is backed with our “As-New” warranty.
The Delatech CDO 859 abatement unit has long been considered the standard for Advanced CVD Process Abatement, and has been effectively used with all PECVD, LPCVD & MOCVD Gases. The model 859 CDO is available with 1, 2, or 4 independent inlet nozzles, allowing connection of up to 4 process chambers, process tools, or vacuum pumps to the CDO.
CSI has also developed many practical component level modifications for Delatech Scrubbers. These components are stocked and readily available.
PART NUMBER | DESCRIPTION |
814-01-013 | 859 DUAL NOZZLE ASSSY |
814-01-014 | 859 MULTI NOZZLE ASSSY |
513-57-001 | FLANGE GASKETS |
428-57-004 | SLIP FIT SPACER |
513-57-002 | INCONEL FLANGE GASKETS |
422-57-022 | SLIP FIT SLEEVE |
428-57-003 | SLIP FIT FLANGE |
422-57-002 | BODY TUBE |
811-02-004 | HEATER POWER FEED THROUGHS |
162-02-009 | CONTROL TERMOCOUPLE Single |
162-02-009-D | CONTROL TERMOCOUPLE Double |
535-02-003 | ORIFICE .012 1/8″ NPT FEMALE X MALE |
811-57-006 | HEATER ELEMENT ASSEMBLY |
423-57-003 | INCONEL LINER |
422-47-010 | PRIMARY COOLING INLET SHORTENED |
422-47-012 | PRIMARY COOLING INLET Lengthened |
751-02-016 | U-JET RECIRC ASSEMBLY |
U-JET RECIRC ASSEMBLY (With Nozzles) | |
U-CHANNEL SPRAY NOZZLE KIT Includes Nozzles | |
SPIRAL NOZZLE | |
548-64-002 | TRI CLOVER CLAMP |
513-64-001 | SCRUBBING TOWER 4″ O-RING |
811-03-015 | COOLING/SCRUBBING TRANSITIONSECTION (PFA) |
4″U | COOLING/SCRUBBING TRANSITIONSECTION (PFA) 4″ U |
116-08-001 | SWITCH LIQUID LEVEL |
422-59-005 | SLOPE DRAIN |
U-CHANNEL DRAIN ASSY W/FLANGE | |
U-CHANNEL DRAIN ASSY 90, 1.5″ | |
511-24-001 | KF40 CENTERING O-RING |
548-24-001 | KF40 CLAMP |
548-16-002 | KF25 CENTERING O-RING |
548-16-001 | KF25 CLAMP |
811-05-001 | CONDUCTIVITY LIQUID LEVEL SENSOR ASSEMBLY |
425-58-005 | DEMISTER SCREEN 3 5/8″ PFA |
753-12-001 | SECONDARY SCRUBBER PACKING |
425-58-004 | LOWER PACKING CARTRIDGE SS (PFA) |
425-58-003 | LOWER SECONDARY SCRUBBING TOWER (PFA) |
751-02-006 | SECONDARY COOLING/SCRUBBING SPRAY NOZZLE |
548-32-003 | KF 50 CENTERING O-RING |
814-06-008 | KF 50 FLANGE UPPER ASSEMBLY |
548-32-001 | KF 50 QUICK DISCONNECT CLAMP |
811-02-005 | RTD PROBE WITH FITTING |
425-58-007 | PFA COATED TOWER DEMISTER MF 100 |
425-59-001 | PFA COATED NPT FLANGE |
814-06-011 | PFA CARTRIDGE ASSEMBLY |
535-02-022 | ORIFICE, .070 1/8″ NPT |
814-06-009 | KF 50 FLANGE ASSEMBLY LOWER W/TANK |
813-59-012 | BLADE RCCM WELD W/FASTENERS |
543-08-005 | WASHER, #8 LOCK TITANIUM |
422-58-006 | FLANGE, PLATE |
542-06-005 | SCREW, 8-32 X 3/8 |
421-58-001 | BEARING TEFLON UPPER |
422-58-004 | GEAR, CLEANING MECHANISM |
553-32-001 | CYLINDER, 2″ DBL ACTING |
581-04-008 | ELBOW, 1/4 X 1/4 MALE |
813-59-003 | PUSHROD ASSEMBLY |
421-58-002 | BEARING, TEFLON LOWER |
422-58-007 | FLANGE, HOUSING |
542-08-012 | BOLT, 8-32 X 1/2 TITANIUM |
422-58-006 | FLANGE, PLATE |
162-06-003 | SENSOR EXH TEMP 50 DEGREE C |
525-10-003 | CONNECTOR 5/8 X 1/2 MALE NPT |
552-02-011 | REGULATOR 5 PSI PRESET |
151-02-002 | SOLENOID 24V N/O (N2) |
533-50-001 | N2 ROTOMETER |
151-24-018 | SOLENOID 24V N/C |
151-10-001 | SOLENOID 24V VOLT 4 WAY |
151-24-003 | SOLENOID 24V N/C (CDA-O2 SOURCE) |
113-08-003 | FRESH WATER FLOW SWITCH |
215-08-004 | AIR OPERATED N/C WATER VALVE |
532-04-001 | FRESH WATER FLOW INDICATOR TANK |
215-08-007 | 1/2″ SWING CHECK VALVE |
215-08-006 | TRUE UNION BALL CHECK VALVE 1/2″ |
152-16-012 | SUMP PUMP MOTOR TE-5 WITH HEAD |
152-24-010 | SUMP PUMP HEAD TE-5 ASSEMBLY |
DIAPHRAGM PUMP | |
116-24-001 | N/O LIQUID LEVEL SENSOR |
116-24-004 | N/C LIQUID LEVEL SENSOR |
LIQUID LEVEL SENSOR | |
752-16-002 | HEAT EXCHANGER |
210-24-001 | Y STRAINER CARTRIDGE |
152-24-015 | PUMP HEAD RECIRC TE-7 |
152-24-012 | RECIRC PUMP TE-7 WITH HEAD |
812-16-004 | WATER FLOW SENSOR /SWITCH RECIRC |
532-02-001 | WATER FLOW INDICATOR |
531-10-001 | AIR ROTOMETER 858-02 |
111-50-001 | AIR FLOW SENSOR/SWITCH 60-6 |
113-20-001 | N2 FLOW SENSOR/SWITCH FOR MULTI NOZZLE |
113-02-001 | N2 FLOW SENSOR/SWITCH FOR SINGLE & DUAL NOZZLE |
535-02-001 | ORIFICE .003 |
551-40-005 | MAGNEHELIC 2 TO -2″ |
PHOTOHELIC 2 TO -2 | |
117-02-001 | SWITCH PRESSURE PRESET 2.0 WC |
117-05-001 | SWITCH PRESSURE PRESET 0.5 WC |
535-02-022 | ORIFICE .070 |
535-02-023 | ORIFICE .035 |
535-02-003 | ORIFICE .012 |
1/2″ TUBE x 3/8″ NPT, 90 ELBOW | |
1/2″ TUBE x 1/2″ NPT, 90 ELBOW | |
1/2″ GRAB RING | |
1/2″ O-RING | |
1/2″ NUT | |
NITRILE O-RING | |
115-32-004 | CONTACTOR, 3 PHASE |
125-10-001 | FUSE, 10 AMP 250V |
125-03-001 | FUSE 3 AMP 250V (TE-5) |
125-10-001 | FUSE 10 AMP (TE-7) |
135-42-001 | Relay, 3A 120VAC |
Relay, 6A 129VAC | |
153-25-203 | 6 SLOT BASE 110/220 VAC |
153-25-101 | DL230 CPU |
153-25-302 | DIGITAL INPUT MODULE 24VDC 16 POINT |
153-25-404 | DIGITAL OUTPUT MODULE 16 POINT SOURCING |
153-25-503 | RELAY OUTPUT MODULE 7 POINT, 7 COMMONS |
161-24-005 | TEMPERATURE CONTROLLER |
121-01-012 | 858 DOUBLE LEVEL TERMINAL RKD2.5 |
121-04-014 | FEED THROUGH TERMINAL |
121-01-011 | GROUND TERMINAL |
121-01-015 | GROUND TERMINAL 6 AWG |
134-42-001 | RELAYS KHAU1711A-24 |
114-30-003 | BREAKER 30 AMP |
125-05-001 | .5 AMP 250VAC TIME DELAY FUSE |
125-02-003 | .25 AMP 250VAC TIME DELAY FUSE |
125-06-001 | 6 AMP 250VAC TIME DELAY FUSE |
133-24-001 | MERCURY RELAY 24V HG |
136-12-001 | CONDUCTIVITY RELAY 120V |
115-32-001 | MAIN TRIP CONDUCTOR |
186-04-001 | TRANSFORMER 120/220 TO 24 VAC |
134-24-002 | RELAY, 24 VAC/VDC SPOT DIN RAIL MOUNT |
114-02-001 | BREAKER 2 AMP |
114-15-001 | BREAKER 15 AMP |
185-24-004 | 24 VDC POWER SUPPLY |
142-24-001 | SD ALARM BOARD |
133-22-001 | T85N11D114-24 RELAY |
152-24-019 | FAN, COOLING 3 5/8 |
162-58-001 | LIMIT SWITCH |
114-40-002 | BREAKER 40 AMP GFI (Not Shown) |
40A GFCI Breaker with lug plate | |
Heater wire /per ft | |
Heater Terminal (High Temp) | |
12-WIRE CABLE (Sensor Wiring) |