Gas Sticks & Panels

 Gas Sticks

A gas stick built by an ISO-certified manufacturer and thoroughly tested to industry standards is a necessary part of an effective gas delivery system. CSI provides ultra-high purity, high purity and general-purpose gas sticks. Gas stick assemblies provide the ability to distribute gas from a single panel source to multiple tool outlets.

•      Ultra-high & high purity sticks for wafer contact gases

•      General purpose sticks in brass or stainless

•      2” rail system in 18” or 31” lengths

•      Complete drawing set for submittals

•      Multiple filtration options

•      Full analytical testing offered

Gas Panels

As a full service ultra-high purity (UHP) fabrication shop, CSI supplies SEMI S2 certified, production-ready ultra-high purity gas source systems, distribution systems and control technology. UHP gas panels provide safe, efficient distribution of process gases when system cleanliness and product purity are critical. They are designed to be compact, minimizing the space they take up in your facility. Gas distribution VMBs are also available to provide a complete system for your high purity gas distribution needs.

  • • Auto-crossover panels

    • Automatic panels

    • Stand-alone manual panels

    • Modular manual panels

    • Purge panels

  • • Conforms to SEMI S2 standards

    • Upholds sample validation testing standards

    • Helium leak tested to 1x10-9 atm-cm3/sec

  • • Designed for nitrogen and other self-purging gases

    • Manual pigtail purge capability

    • Purge gas isolation valve

    • Venturi vacuum generator

    • Gauge based pressure monitoring

    • Assemblies rront-mounted on standoffs for easy access and manifold maintenance

    • Ultra-high purity orbitally welded and VCR construction

    • Ultra-high purity diaphragm valves

    • Single stage tied diaphragm regulator

    • Conical filter gasket

    • Includes rigid pigtail with standard CGA connection

  • • Outlet isolation valve

    • Retrofittable to gas cabinets

    • Purge gas purification

DISS Gaskets

As a vendor of DISS Gaskets for the past 25 years, Critical Systems inspects each gasket under magnification to assure proper fit and functionality. The DSS-1000-N is the premier gasket used for sealing UHP CGA (DISS) gas cylinder connections. Designed for demanding purity performance, the robust and non-rotating connection is built to specification for the microelectronics industry. Our proprietary annealing process ensures a leak-free installation, and eliminates torrid wear issues. The DSS-1000-N is the gasket of choice whenever high purity gases call for leak free connections.

  • Soft-Annealed Nickel 200 Material

  • Fits all 630/710 Series CGA Connections

  • Compliant with CGA-TB9-1993

  • Hardness Max 105 Vickers / 75R15T

  • 5Ra Maximum Surface Roughness

  • Hot DI Cleaned & HEPA Dried