EXHAUST GAS SCRUBBER ABATEMENT SYSTEMS

Through our experience working with specialty gases in high production Semiconductor Fabs, we have learned first-hand that process tool recipes call for different mixtures of gases that require unique abatement solutions for effective destruction. Abatement technologies that are effective at removing flammable gases, for example, may not at all be effective at removing corrosive gases. For this reason, CSI does not take a “one-technology” approach to gas abatement, but rather employs a variety of technologies, such as Wet, Thermal/Wet, Burn, and Dry Bed systems, that are selected to provide the most efficient removal of the target gas species. CSI’s goal with Exhaust Gas Abatement is always the same, removal of the target gas to below its PEL (permissible exposure limit).

CSI’s Reconditioned Delatech Burn Wet Scrubbers

Fully reconditioned and warranted for affordability, the Delatech is an industry workhorse, providing complete abatement of flammable and water soluble gases

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CSI’s Reconditioned Guardian Burn Box Scrubbers

Fully reconditioned and warranted for affordability, the Guardian (4 and 8) provide destruction of flammable gases.

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CSI’s NEW Ganymede Wet Scrubbers

Providing unsurpassed abatement of water soluble gases, the Ganymede wet scrubber will handle flows from 350 to 2500 slpm and features on board chem inject and the longest scrubbing columns of any commercially available wet scrubber, while having the lowest water consumption of any scrubber its size.

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CSI’s NEW Callisto Dry Bed Scrubbers

Guaranteed removal of all target gases to below the permissible exposure limit of the gas, the Callisto is available in single or dual canister models, operates at ambient temperatures, requires little maintenance, and doesn’t use water or fuel. Media beds featuring Chemisorption or catalytic media provide complete hazardous gas removal at the Lowest Cost of Ownership. Made in the USA!

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CSI’s NEW ZEUS Dry Bed Scrubbers

The upsized version of the Callisto is designed for high volume MOCVD reactors that use Arsine and Phosphine flows in excess of 10 slpm. Features media beds free of carbon for low temperature hazardous gas removal, even with high flow hydrogen present. Made in the USA!

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jupiter scientific europa

CSI’s NEW Europa Dry Bed Scrubbers

Originally designed as a Catastrophic Release Scrubber for flow rates to 500 CFM, the Europa is used for gas cabinet exhaust abatement, high flow target gas removal from process flow rates prior to the Callisto and as a bypass scrubber for the ZEUS MOCVD scrubber. Made in the USA!

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CSI’s NEW Olympus Dry Bed Scrubbers

The Olympus is the high flow version of the Europa and is provided for Catastrophic Release Applications up to 2500 CFM of Exhaust Gas. The beauty of the Olympus and Europa Cat Release Scrubbers is they operate at ambient temperatures, require little maintenance and have negligible operating costs. Made in the USA!

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