EXHAUST GAS SCRUBBER ABATEMENT SYSTEMS
Through our experience working with specialty gases in high production Semiconductor Fabs, we have learned first-hand that process tool recipes call for different mixtures of gases that require unique abatement solutions for effective destruction. Abatement technologies that are effective at removing flammable gases, for example, may not at all be effective at removing corrosive gases. For this reason, CSI does not take a “one-technology” approach to gas abatement, but rather employs a variety of technologies, such as Wet, Thermal/Wet, Burn, and Dry Bed systems, that are selected to provide the most efficient removal of the target gas species. CSI’s goal with Exhaust Gas Abatement is always the same, removal of the target gas to below its PEL (permissible exposure limit).
