As semiconductor devices get faster and faster, in order to achieve increased levels of integration and higher detail in device construction, the intro of brand-new products into the production processes is needed. The results of this are that there will be a bigger selection as well as boosted volume requirements of liquid resources made use of in the semiconductor production procedure.
Engineered chemical delivery systems utilize technology in which the source chemical can be bubbled with a carrier gas, heated to vaporization, delivered in liquid form with a push gas, and / or delivered utilizing a patented control technique. Any delivery system can be configured for multiple panel crossover to ensure uninterrupted chemical delivery.
Liquid source vaporization control systems utilize different methodologies, including baking, direct injection and mixing to guarantee efficient and stable delivery of vapor to the point of use.
TEOS Delivery Systems
TEOS Liquid Delivery System
TEOS Vapor Delivery System
CVD Vapor Delivery System
CVD Liquid Delivery System
Precursor Delivery Setup.
Since 1998, Critical Systems, Inc. (CSI) has been providing Gas Cabinet, Valve Manifold Boxes & Gas Abatement Systems (Gas Cabinets and Gas Scrubbers, etc.), and Orbital Welding Rental, Lease, Repair and Training Services related to process tool facilitation for Semiconductor, Biotech, Pharmaceutical and related industries. Company headquarters are in Boise, ID USA, with additional locations in Shrewsbury, PA USA – Draper, UT USA – and our new European Sales and Service center in the Netherlands.