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We have an H2O flow alarm on our Delatech 859 scrubber. How do I troubleshoot the problem?
We are planning on buying a M150 Edwards GRC Gas Scrubber. Our process flow is 1.2 lpm, plus inerts and purge gas from the pump. How long can we expect the canister to last?
I am running an ATMI Vector Ultra 3000 and we are adding a new process next to it. Can I add another inlet if we only have one currently?
I have an Edwards D150 GRC and we go through a cartridge in about a year. Are these cartridges really safe to just dump in the trash?
The temperature controller on my Delatech 858 has four dashes (- - - -) across the readout and our tool is not heating up. What do we check?
What is the life time expectancy of gas delivery lines for corrosive gases, specifically Chlorine (Cl2), Hydrogen Bromide (HBr), and Hydrogen Chloride (HCl)?
We have a new tool requiring WF6 (Tungsten Hexafluoride). Can I use a 3 stick valve manifold box in the line to feed the 3 chambers?
My regulators are failing much too quickly on my chlorine system (sometimes after only 3 weeks). Any idea why this happening?
Does a process tool running TEOS require a point-of-use gas scrubber?
Gas Cabinet and Gas Scrubber for a Silicon Nitride Etch Process
Gas Scrubber, Gas Cabinet, Handling Info for LPCVD process using Arsine (AsH3) gas
Recommended point of use gas scrubber for solar processes?
We have an Air Products BCl3 gas cabinet that we want to use in a phosphine system (Gas Guard 500 cabinet). Can you convert the cabinet for us? We want to assure that our system is contamination free.
Are POU Gas Scrubbers needed in a Thin Film Process?
We have a Diborane-Nitrogen system, and would like to use duplex panels w/ two stage regulators. Can we use this type of a panel set up instead of cabinets on a Diborane-Nitrogen system?
Can you provide replacement panels for a Thermco vertical gas furnace? We have several of these to upgrade and the OEM's prices and lead times are such that I need to find an alternate.
I’m seeing an increase in the number high/lows in my orbital welds – how do I correct this?
We're installing an Ammonia (NH3) Gas Cabinet and plan to use a DISS fitting connection for our bottle. What model/type of DISS connection do we need?
I'm looking for a silane (SiH4) gas cabinet that needs to be CGA Code G-13 compliant. What exactly does that mean?
I need to put a purifier into our argon (Ar) gas cabinet. It's an Air Products system. Is there a place to install this, or do I need to modify the panel?
I'm developing the requirements for a medical product, nitrogen gas system. Should I plan on using electropolished stainless steel components?
We’re trying to budget electric power consumption for our 300mm fab that includes all of our major utilities (power, DI water, N2, CDA, PV, PCW, exhaust). Any suggestions?
We are developing a high purity hydrogen system (between the source and fab equipment) and need to determine the tube sizes. I have the peak flow rates and source/system pressures. How do I calculate this?
What is the classification for a Germane Gas Cabinet (GeH4)? We are getting mixed information, and aren't sure if a Temperature Switch is required.
N2 purge panel for silane not being able to deliver high pressure to test pigtail after bottle changes
Vector 3000 scrubber problem - we don't have a chemical system, but on the mmi, it is showing a chemical system alarm. Why? I can't figure out how clear the alarm?
We are purchasing a CVD tool to deposit thin film, high-k dielectrics, which means that we need to add a TMA (trimethylaluminum) gas cabinet. EH&S is saying we need a UVIR Flame Monitor for this gas cabinet. True?
The media test results on my HEGA filters show a 'Negative Remaining Life at 20% breakthrough'. How do I interpret this, and manage change-outs more effectively?
High purity stainless steel process piping: Clean after installation or build clean?
I need to connect a high purity stainless steel system to my existing copper main system. What do I need to connect these together the right way?
Do you guys integrate in-line filters into gas cabinets? Is there a requirement to provide an exhausted enclosure around point of use filters at the tool?
We are starting up a LPCVD process and are looking for a good POU scrubber for this process. What would you recommend?
Question re: heating gases for etch tool that uses Cl2 & BCL3. The gas cabinets area is 18°C. The etch tool chamber is @ 80°C idling and up to 150°C during process. What would you recommend we heat the gases to?
Our etch process seems to be causing a build-up of material in the pump & exhaust piping on the backside of the tool. What’s causing this?
Heat buildup on orbital weld head is slowing production - how do I troubleshoot this?

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Since 1998, Critical Systems, Inc. (CSI) has been providing Gas Cabinet, Valve Manifold Boxes & Gas Abatement Systems (Gas Cabinets and Gas Scrubbers, etc.), and Orbital Welding Rental, Lease, Repair and Training Services related to process tool facilitation for Semiconductor, Biotech, Pharmaceutical and related industries. Company headquarters are in Boise, ID, with additional locations in Burnsville, MN, and Shrewsbury, PA, Austin, TX and Draper, UT.

MAIN OPERATIONS CENTER

7000 West Victory Rd. Boise, Idaho 83709
Phone: (877) 572-5515 / Fax: (208) 898-0288 / Email Us »

GAS SCRUBBER RECONDITIONING CENTER

2090 County Road 42, Suite 106 Burnsville, MN 55337
Phone: (877) 572-5515 / Email Us »

ORBITAL WELDING SERVICES DIVISION

24 Northbrook Lane, Suite 2 Shrewsbury, PA 17361
Phone: (877) 572-5515 / Email Us »

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