Critical Systems, Inc

"ASK AN EXPERT" FORUM

• » We are purchasing a CVD tool to deposit thin film, high-k dielectrics, which means that we need to add a TMA (trimethylaluminum) gas cabinet. EH&S is saying we need a UVIR Flame Monitor for this gas cabinet. True?
• » Vector 3000 scrubber problem – we don’t have a chemical system, but on the mmi, it is showing a chemical system alarm. Why? I can’t figure out how clear the alarm?
• » What is the classification for a Germane Gas Cabinet (GeH4)? We are getting mixed information, and aren’t sure if a Temperature Switch is required.

FREQUENTLY ASKED QUESTIONS

• » What is the most cost effective design for high purity gas manifold system (long runs with numerous branch tees and valves)?
• » How do I determine if I can add another gas cabinet to an existing gas pad exhaust system without replacing ductwork, fan, or scrubber?
• » How do I calculate tube and pipe size in my gas system given specific gas flow rates and pressure metrics?
• » Weld parameters for a high purity stainless steel gas system: What is “acceptable”?
• » How do reconditioned cabinets stack up to a new cabinet?

HOW TOs & GUIDELINES

• » Estimate the equivalent energy consumption of your semiconductor Fab manufacturing equipment
• » Troubleshooting High/Lows on Orbital Welds
• » Preventative Maintenance on a Delatech 858/859 Gas Scrubber

COST SAVINGS TOOLS & TIPS

• » Contaminated gas panels CAN be refurbished!
• » Point-of-Use Abatement offloads expensive CFS Scrubbing Systems, and more.
• » Argon Purge Restrictors: 7X savings on Argon Gas

CSI Designed Components for Improved Delatech Scrubber Performance

The Critical Systems, Inc. Abatement Team has been on the ‘receiving end’ of many troubleshooting phone calls for many years, and recently developed two inexpensive product modifications to address the most frequent problem areas on these scrubbers. “U” Shaped Drain The most common problem with Delatech Scrubbers is sediment buildup in the drain assembly.   This MORE →

Orbital Welding vs. Traditional GTAW

GTAW Process and Application For the purpose of this discussion we will focus on the Gas Tungsten Arc Welding (GTAW) process, particularly as it relates to Orbital Welding process capabilities, including TIG (Tungsten Inert Gas) and MIG (Metal Inert Gas) or “Wire Feed” welding.   And, we will keep our discussion around the welding of pipe MORE →

Save time and money when replacing a contaminated gas panel

Sooner or later it happens at every facility. You get a bad cylinder of gas, a component fails, a cycle purge wasn’t properly completed, and your gas panel or a gas line gets contaminated.  The good news is that an effective approach to the problem can save you weeks in downtime. The typical response when MORE →

RECENT VIDEO CLIPS

Launch of the Idea Collaboration Center

Ted Jones, President of Critical Systems, Inc., briefly discusses how CSI got started, and why we’ve created the Idea Collaboration Center – a resource for all things related to process tool facilitation in advanced technologies.