18 Apr I’m looking for a silane (SiH4) gas cabinet that needs to be CGA Code G-13 compliant. What exactly does that mean?
Silane (SiH4) Gas is classified as a Pyrophoric, Flammable, High Pressure Gas. Because of the explosive (and often unexplainable) nature of Silane (SiH4), a code has been enacted to provide for it’s safe delivery. That Code is CGA Code G-13. Simply stated, G-13 is that section of the International Fire Code that deals with the storage and delivery of Silane gas in concentrations greater than 2%. Specifically in a Silane gas cabinet, you will need the following to be compliant:
· High Flow Door
· UVIR infrared flame monitor
· Regulator bonnet vent kit
· Restricted flow orifice in the cylinder valve
· Pneumatic cylinder valve on the process gas cylinder
· Excess Flow Switch and Monitoring
· Sprinkler Head in the Cabinet
· Vacuum Venturi with a trickle purge
· “Z-Purge” Controller – N2 purged controller electronics
There are requirements for exhaust flows as well, which is why the high flow doors are needed. At full cylinder pressure (1650 psi) a silane gas cabinet, with a 0.010 restricted orifice in the cylinder, is required to have 810 CFM of exhaust moving through it when the door is closed. You can find other component requirements of a silane cabinet on the table at the bottom of this Gas Delivery Systems page.
I hope this gives you what you need. And, yes, we provide Silane gas delivery systems. We have been providing reconditioned and warranted gas cabinets that comply to the CGA Code G-13 for many years, and fully understand these requirements. Please feel free to call us if you have any more questions or if you’d like to receive a quotation.