Gas Cabinets for Ultra High Purity Gases
Engineered for Precision. Built for Performance. Trusted Worldwide.
Critical Systems, Inc. (CSI) is an industry leader in ultra-high purity gas delivery systems, offering a comprehensive line of gas cabinets, gas panels, valve manifold boxes, and gas distribution systems designed to support the most demanding applications in semiconductor, aerospace, biotech, and advanced materials industries.
For more than 25 years, CSI has defined the benchmark in high-purity gas delivery—helping research labs and high-volume production facilities maintain strict control over hazardous and specialty gas processes. Whether you're managing silane, ammonia, or rare and inert gases, our systems deliver uncompromised safety, reliability, and repeatable performance.
Engineered to the Highest Standards
CSI gas cabinets and panels are manufactured to exceed global compliance standards, including:
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SEMI S2 – Safety guidelines for semiconductor manufacturing equipment
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CGA G-13 – Design standard for gas cabinets and enclosures
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ISO 9001 – Quality management for consistent manufacturing
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ASME B31.3 – Process piping integrity
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NFPA 70, ANSI IPC, and the International Fire Code
These certifications ensure every gas cabinet, gas panel, or gas manifold box you install meets critical safety, environmental, and operational criteria for high-risk gas applications.
Complete Gas Delivery Solutions
Every facility is unique, and so are your gas delivery needs. CSI's custom-built specialty gas delivery systems are modular, scalable, and designed for seamless integration with your existing infrastructure.
Our product line includes:
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Ultra-High Purity Gas Cabinets: Designed with low internal volume, precision venturi configurations, and intuitive alarm and shutdown systems to ensure safe gas handling.
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Custom Gas Panels: Available in auto-crossover, manual, and purge panel configurations, with VCR construction and UHP diaphragm valves for the highest level of gas purity.
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Valve Manifold Boxes (VMBs) and Valve Distribution Boxes: Enable multi-tool gas distribution with integrated life safety features and configurable stick counts.
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Gas Manifold Boxes and UHP Splitter Boxes: Engineered to distribute single-source gas to multiple endpoints while maintaining purity integrity.
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Gas Delivery Controllers: Modern PLC-based control systems designed for full automation, safety interlocks, and remote status monitoring.
Each gas delivery system is designed for longevity and minimal maintenance, using Tier 1 components and electropolished stainless steel or Hastelloy C22 depending on your process requirements.
Materials of Construction
Engineering Data
Design Standards
Automated Controls
Panel Options
Gas System Options
Reliability, Safety & Support—Backed by Experts
CSI isn’t just a supplier—we’re your long-term partner in gas system success. From initial consultation to post-installation support, we ensure that every system functions optimally in your environment.
What sets our systems apart:
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Built-in safety interlocks, automated shutdowns, and configurable purge sequences
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Continuous HMI monitoring for pressure, weight, exhaust, and fire sensors
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Ambidextrous design for easy technician access and panel replacement
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Remote communication via MODBUS for centralized system control
And when the unexpected happens, our 7-day-a-week support team is ready. With fast lead times, off-the-shelf replacement parts, and seasoned field technicians, you’ll never be left without a solution.
Quality Built into Every Detail
As an ISO 9001-certified manufacturer, CSI follows a rigorous Quality Management System at every production stage. From engineering and prototype validation to full-scale manufacturing, our processes ensure that each gas cabinet, gas delivery system, and gas panel we produce meets the most stringent quality, purity, and safety requirements.
Discover the CSI Difference
Download our Manufacturing Capabilities Guide to learn more about our custom fabrication processes, precision welding techniques, and proven expertise in ultra-high purity gas delivery systems.
Whether you’re designing a new lab, upgrading existing infrastructure, or retrofitting legacy equipment, CSI delivers solutions that perform—flawlessly, safely, and with unmatched longevity.