Gas Delivery Systems

Gas Delivery Systems Customized For All Semiconductor Related Processes

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The Critical Systems engineering and gas technician teams have built new, or reconditioned close to 3000 high purity process gas systems of many sizes and configurations for customers worldwide.  Every gas system is run through CSI’s extensive certification process and comes with a 6 month comprehensive warranty. CSI has 100’s of professionally decommissioned Gas Cabinets, Valve Manifold Boxes & Panels, Process Gas Rack Units, and Gas Panels in stock from major semiconductor fabs throughout the country.   These systems are from top of the line OEM’s, such as Air Products, Praxair, and others.    Our extensive inventory allows us to quickly customize a system for any combination of gases, process configuration, and flow rate.

Critical Systems provides gas delivery systems for virtually all semiconductor related processes:  compressed gases such as Silane (SiH4) or Carbon Tetrafluoride (CF4), or liquefied gases like Phosphine (PH3) or Ammonia (NH3).  We also regularly provide gas systems for corrosives, such as Chlorine (Cl2) and Hydrogen Bromide (HBr), and flammables like Hydrogen (H2) and Methane (CH4).

GAS CABINET ESSENTIALS BY GAS TYPE (Common Gases)

Gas State  Recommended Regulator  Recommended Excess Flow Switch Pressure Transducer  Cylinder Connection Other Requirements
Ammonia (NH3)  Liquified Gas  AP1410SM2PWMV4MV4  6LFV4DT4ASDU7576 PT1:    250 psi PT2:    250 psi  720 DISS Temperature Switch Scale(s)
Argon (Ar)  Compressed Gas (inert)  AP1510SM2PWMV4MV4  Not Required PT1:  3000 psi PT2:    250 psi  718 DISS None
Arsine (AsH3)  Liquified Gas  AP1410SM2PWMV4MV4  6LFV4DT4ASDU7576 PT1:  1000 psi PT2:  1000 psi  632 DISS Temperature Switch Scale(s)
Boron Trichloride (BCL3)  Liquified Gas  AP1402TSMA2PWMV4MV4  Not Required PT1:    100 psi PT2:    100 psi  634 DISS Scale(s)
Carbon Tetrafluoride (CF4)  Compressed Gas (inert)  AP1510SM2PWMV4MV4  Not Required PT1:  3000 psi PT2:    250 psi  716 DISS None
Chlorine (CL2)  Liquified Gas  AP1410SM2PWMV4MV4  6LFV4DT4ASDU7576 PT1:    250 psi PT2:    250 psi  728 DISS Scale(s)
Dichlorosilane (SiH2CL2)  Liquified Gas  AP1402TSMA2PWMV4MV4  Not Required PT1:    100 psi PT2:    100 psi  636 DISS Scale(s)
Germane (GeH4)  Compressed Gas  AP1510SM2PWMV4MV4  6LFV4DT4ASDU7576 PT1:  3000 psi PT2:    250 psi  632 DISS Temperature Switch
Helium (He)  Compressed Gas (inert)  AP1510SM2PWMV4MV4  Not Required PT1:  3000 psi PT2:    250 psi  718 DISS None
Hydrogen (H2)  Compressed Gas  AP1510SM2PWMV4MV4  6LFV4DT4ASDU7576 PT1:  3000 psi PT2:    250 psi  724 DISS Temperature Switch
Hydrogen Bromide (HBr)  Liquified Gas  AP1410SM2PWMV4MV4  6LFV4DT4ASDU7576 PT1:  1000 psi PT2:    250 psi  634 DISS Scale(s)
Hydrogen Chloride (HCL)  Liquified Gas  AP1410SM2PWMV4MV4  6LFV4DT4ASDU7576 PT1:  1000 psi PT2:    250 psi  634 DISS Scale(s)
Methane (CH4)  Compressed Gas  AP1510SM2PWMV4MV4  6LFV4DT4ASDU7576 PT1:  3000 psi PT2:    250 psi  724 DISS Temperature Switch
Nitrogen (N2)  Compressed Gas (inert)  AP1510SM2PWMV4MV4  Not Required PT1:  3000 psi PT2:    250 psi  718 DISS None
Nitrogen Trifluoride (NF3)  Compressed Gas  AP1510SM2PWMV4MV4  6LFV4T4ASDU7609 PT1:  3000 psi PT2:    250 psi  640 DISS None
Phosphine (PH3)  Liquified Gas  AP1410SM2PWMV4MV4  6LFV4DT4ASDU7576 PT1:  1000 psi PT2:    250 psi  632 DISS Temperature Switch Scale(s)
Silane (SiH4)  Compressed Gas  AP1510SM2PWMV4MV4  6LFV4T4ASDU7609 PT1:  3000 psi PT2:    250 psi  632 DISS UVIR VO Pneumatic Valve
Sulfur Hexafluoride (SF6)  Compressed Gas (inert)  AP1510SM2PWMV4MV4  Not Required PT1:  3000 psi PT2:    250 psi  716 DISS None
Tungsten Hexafluoride (WF6)  Liquified Gas  AP1402TSMA2PWMV4MV4  Not Required PT1:   100 psi PT2:   100 psi  638 DISS Scale(s)

 

Attached here:  General Information and Guidelines on Gas Cabinets, VMBs, Rack Units, and Hazardous Gas Box Enclosures.

In addition to Gas Delivery Systems, Critical Systems also provides reconditioned point-of-use gas scrubbers at a savings of up to 50% vs. a new, equivalent scrubber.

Gas Delivery Systems (new) was last modified: November 4th, 2016 by admin

Since 1998, Critical Systems, Inc. (CSI) has been providing Gas Cabinet, Valve Manifold Boxes & Gas Abatement Systems (Gas Cabinets and Gas Scrubbers, etc.), and Orbital Welding Rental, Lease, Repair and Training Services related to process tool facilitation for Semiconductor, Biotech, Pharmaceutical and related industries. Company headquarters are in Boise, ID, with additional locations in Burnsville, MN, and Shrewsbury, PA, Austin, TX and Draper, UT.