Valve Manifold Boxes & Panels
(VMBS & VMPS)
Smart Gas Distribution Without Downtime
Our Valve Manifold Boxes are engineered to draw from a single source and distribute process gases to multiple tools or locations. With integrated vent and purge functions, technicians can safely service individual gas sticks or replace components without affecting other operational lines—a critical advantage in high-uptime facilities.
Systems are available in both cabinet-style enclosures for hazardous gases (with integrated exhaust and containment) and panel-style configurations for inert gas delivery. Whether your process calls for high-purity or ultra-high-purity gas distribution, CSI’s VMBs and VMPs are designed to keep you running safely and efficiently.
Precision Gas Distribution Through Intelligent Design
When precision, uptime, and safety are non-negotiable, Critical Systems, Inc. delivers advanced Valve Manifold Boxes (VMBs) and Valve Manifold Panels (VMPs) that redefine expectations in high-purity and ultra-high-purity gas delivery systems. Designed to enable seamless gas routing, venting, and purging, our VMB/VMP solutions ensure operational continuity across multi-tool environments, without interrupting critical processes.
Built for semiconductor fabs, biotech labs, and advanced material processing facilities, CSI’s valve distribution boxes and UHP splitter boxes distribute hazardous or inert gases with extreme reliability, even under high pressure or corrosive conditions.
Valve Manifold Panels
VMP - A Valve Manifold Panel (VMP) is a critical component in high-purity gas delivery or customized fluid control systems. It provides a centralized, compact solution for distributing and managing multiple gas or liquid streams with precision. Designed for ultra-clean applications, a VMP integrates valves, regulators, pressure gauges, and purge lines to ensure reliable, contamination-free delivery.
Commonly used in semiconductor, pharmaceutical, and specialty gas industries, VMPs allow for safe switching, purging, and isolation of process gases. Configurations are tailored to meet specific requirements, including manual or automated control, stainless steel or specialized alloy construction, and multiple outlet configurations. With enhanced safety and efficiency, a VMP optimizes flow control, reduces leaks, and ensures system integrity for high-purity applications.
CONTROLLERS & VMB OPTIONS
Automation & Control Options
Precision control is vital to modern specialty gas delivery systems. CSI offers PLC-controlled systems with real-time data capture and safety shutoff capabilities. Choose from:
-
4-Stick Semi-Automatic (Bottom Mount)
-
4–8 Stick Semi-Automatic (Top Mount)
-
4–8 Stick Fully Automatic Control Options
Each control unit integrates with facility monitoring systems through MODBUS or other protocols to streamline alerts and remote shutdowns when needed.
VMB Enclosure Options
CSI provides a range of VMB sizes tailored to the footprint of your space and process requirements. All enclosures are fabricated for durability, corrosion resistance, and compliance with industry safety codes.
-
Mini Enclosure (4-stick): 20” W × 16.5” D × 47.35” H (6" exhaust collar)
-
Standard 4-stick: 24” W × 16.5” D × 47.35” H
-
8-stick: 30.13” W × 16.5” D × 47.35” H
-
GIB Enclosure: 30.13” W × 15.5” D × 39.10” H
Each enclosure is designed for rapid access, tool-free maintenance, and maximum airflow management.
Optional Accessories & Enhancements
Customize your system with additional safety and monitoring options, including:
-
Stick-specific excess flow switches
-
Fire sensors (standard temperature, UV/IR, or dual IR)
-
Heat tracing for low vapor pressure (LVP) gases
-
Modular alarm and sensor integration across the gas delivery system
Built-In Safety Systems
Every valve manifold box and valve distribution panel from CSI integrates life safety technologies for protection in hazardous environments. Our systems feature:
-
UV/IR gas detection sensors
-
Temperature switches
-
Remote emergency shutdown capability
-
EMO integration
-
Fire sprinkler integration
-
Toxic gas monitors
-
Exhaust flow sensors
Configurations Built Around You
We offer multiple stick configurations to meet a wide range of application-specific requirements:
-
4-stick and 8-stick Valve Manifold Boxes
-
Up to 12-stick Valve Manifold Panels
-
Single-stick gas assemblies for streamlined gas routing from centralized sources
-
Custom-engineered gas distribution systems that eliminate the need for enclosures in appropriate use cases.
Our systems are also highly modular, allowing for growth, tool changes, or process expansion without a major infrastructure overhaul.
Optional VMB Accessories
VMB Features
VMB Enclosure
Controller Options
CSI’s Valve Manifold Boxes and Valve Manifold Panels represent the next generation of ultra-high purity gas distribution systems—backed by decades of innovation, ISO-certified manufacturing, and a reputation built on reliability.
Whether you're retrofitting legacy infrastructure or scaling a new fab, CSI's gas distribution solutions give you the performance edge, safety assurance, and long-term flexibility you need.