VMBs & VMPs
SAFE GAS DISTRIBUTION
CSI offers standard manual gas boxes, as well as semi-automatic gas boxes with pneumatic ESO valves and life safety controllers. VMBs have 4-stick and 8-stick configurations. VMPs can be configured up to a 12-stick. CSI also has single gas sticks and gas stick assemblies that allow for gas distribution through multiple outputs from a single-source supply without the need for a gas valve box enclosure when warranted.
ADVANCED VALVE MANIFOLD BOXES
Valve Manifold Boxes (VMBs) are designed with vent and purge features to take a single source gas and distribute to multiple tools. This allows the user to service components within the VMB to safely change out or remove the gas stick without taking all the tools down. VMBs serve as distribution boxes or may allow multiple compatible gases to enter and exit with the ability to vent and purge while other processes are still running. They are designed to be as simple as gas isolation boxes or vent and purge stick assemblies. VMBs may include devices to monitor life safety events, such as high pressure or excess flow, to trigger emergency shutoff valves all monitored with PLC-based controllers. The VMB system is configured in either a Valve Manifold Panel (VMP) for inert gases, or a cabinet for systems that require exhaust capabilities.
CSI provides safe, reliable, and continuous high purity gas distribution. Our systems come in a variety of stick configurations to effectively meet your cost, process, and quality requirements and are engineered to support diverse application-specific needs.
Valve Manifold Panels
VMP - A Valve Manifold Panel (VMP) is a critical component in high-purity gas delivery or customized fluid control systems. It provides a centralized, compact solution for distributing and managing multiple gas or liquid streams with precision. Designed for ultra-clean applications, a VMP integrates valves, regulators, pressure gauges, and purge lines to ensure reliable, contamination-free delivery.
Commonly used in semiconductor, pharmaceutical, and specialty gas industries, VMPs allow for safe switching, purging, and isolation of process gases. Configurations are tailored to meet specific requirements, including manual or automated control, stainless steel or specialized alloy construction, and multiple outlet configurations. With enhanced safety and efficiency, a VMP optimizes flow control, reduces leaks, and ensures system integrity for high-purity applications.
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4 stick mini enclosure: 20” wide x 16.5” deep x 47.35” tall with 6” exhaust collar
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4 stick enclosure: 24” wide x 16.5” deep x 47.35” tall with 6” exhaust collar
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8 stick enclosure: 30.13” wide x 16.5” deep x 47.35” tall with 6” exhaust collar
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GIB enclosure: 30.13” wide x 15.5” deep x 39.10” tall with 6” exhaust collar
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Toxic gas monitors
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Excess flow switch dedicated to each individual stick
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Fire sensors: standard temperature switch or optional UV/IR or dual IR sensors
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Heat trace for LVP gases
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UV/IR sensor
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Temperature switch
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Remote shutdown capability
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EMO
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Sprinklers
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Toxic monitors
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Exhaust Switch
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4 Stick Semi-Auto (Bottom Mount)
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4-8 Stick Semi Auto (Top Mount)
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4-8 Stick Full Auto