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ABATEMENT TECHNOLOGY

Until the PERIODIC TABLE is exhausted, our MISSION Continues

With four decades in exhaust management, CSI provides OEMs, semiconductor fabs, and R&D customers reliable solutions for today’s toughest abatement challenges. Our dry bed, wet, and burn/wet systems ensure safe handling of toxic, corrosive, and flammable chemistries. Backed by expertise, our team tackles the most demanding applications, supporting innovation and advanced device capabilities.

For over 20 years Critical Systems has set the standard for 100% American-made, quality equipment and products. Our Extraction Technologies division brings together the finest exhaust gas abatement equipment, high end filtration products (HEPA, ULPA, & gas phase filters) and point of use purification of inert and hazardous gases in an offering that provides not only exceptional performance, but also the bonus of reasonable lead times.

Purification

From gas pad to point of use, CSI delivers tailored purification solutions for optimal performance and cost efficiency. From inert to hazardous gases, we protect your process with turnkey solutions, including skid and bypass manifold fabrication.

Filtration

CSI designs HVAC MAU & RAU filter systems for efficiency, low power use, and reduced maintenance. Our durable HVAC & ULPA filters ensure superior performance, while gas phase filters remove contaminants. CSI offers alternatives by cross-referencing competitive part numbers.

Abatement Systems

High efficiency and environmental responsibility guide our products. CSI analyzes your application to recommend the best abatement technology, ensuring TLV compliance, cost efficiency, and sustainability by reducing water, fuel, and power consumption.

Shorter Lead Times

Long lead times and supply chain issues causing delays? Call Critical Systems. Our American-made products reduce lead times, while our experts provide performance-improving solutions and faster alternatives to your current suppliers.

Abatement Technology FAQs

  • Currently, CSI does not offer a thermal oxidizer system, but most gases can be abated using a dry bed alternative. 

  • Dry bed abatement is a very diverse technology able to target a range of corrosive, toxic, and flammable gases. Except for a few exceptions, dry bed canisters can be custom blended to target specific gases inside an application. Excluding Hydrogen, Methane, and certain PFCs most gases have 99% abatement efficiency or higher. For more details, read about it in our blog: https://www.criticalsystemsinc.com/post/how-dry-bed-abatement-works 

  • (shelf life and in-use lifetime) Dry bed media lifetime depends on what medias are used as well as the volume of gas released into the canister. Once we have a better understanding of the application and gases, we can provide an estimate of weight capacity to determine how much gas can be abated. It is always important to ensure you are not introducing new gases and running air oxidation when relevant to maximize canister lifetime.

  • We certainly do. Some of our discovery visits are purchased by the customer for specific applications while others are more informal. Lunch and Learns can cover a range of topics that CSI is knowledgeable on such as general gas delivery, abatement capability, specific pieces of equipment, and others. If you have any interest in having CSI visit your location, just let us know. 

  • CSI offers a best in class 2 year warranty on our Gas Systems. Abatement equipment has a 1 year warranty.

  • CSI provides a 2D PDF drawing of all systems the customer purchases. Depending on the piece of equipment, we can provide 3D models upon request.  We do not offer BOMs with our equipment. ​

  • The market conditions can change quickly, however, CSI has averaged an 8-week lead time for standard pieces of equipment. 

  • Primarily Semiconductor, R&D, Pharma/medical, Solar, Battery and industrial deposition applications.

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