RESOURCES

With the recent release of the IPS-200, we recognize that it is its own beast. Join Tim Tycz in the first of our video series on the...

Abatement Technology refers to equipment designed to remove hazardous gases from the exhaust stream of process tools. This equipment is referred to as “scrubbers” and is common in several industries. The most efficient abatement technology depends heavily on the process gases and application requiring the abatement. This article is intended to serve as a general guide to current abatement technologies and is focused primarily on the semiconductor industry. When abatement was